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Location: Phoenix, Arizona
Ships to: US,
Item: 132311473693

All returns accepted:ReturnsNotAccepted
MPN:54-106859A83
Port Diameter:1/4 in
Gas Media:NF3 [Nitrogen Trifluoride]
Qualiflow:Qualiflow
Maximum Flow Rate:500 SCCM
AFC 260:AFC 260

NEW Qualiflow AFC 260 NF3 500 sccm Mass Flow Controller MFC, ASM PN: 54-106859A83 Comes with what you see in the pictures. If you don’t see it, you probably wont get it. Specifications are from Qualiflow and may vary slightly due to upgrades, options, or revisions this unit may or may not have. This part is new, old stock from ASM. The package may have been opened and re-sealed to recalibrate the units so that ASM could ship them when a customer ordered them. The calibration is past due however. ASM Information: Part Number: 54-106859A83 Description: FC-ASM AFC 260-NF3-500 SCCM-VID The Unit’s Tag Reads: Model Number: AFC 260 Flow Range: 500 sccm Gas: NF3 Features: Compatible with other MFC Economic design, simple construction Compatible with MODULINE via optional adapting connector (from factory) Outstanding records throughout various industries Possibility to regulate with external readout Specifications: Flow Range (equivalent N2): 10 sccm to 5 slm (this unit is setup for 500 sccm) Control Range: 2 – 100% F.S. Valve Type: Thermal Valve Rest Position: Normally Open only Accuracy: ±1% of F.S. Linearity: ±0.5% of F.S. Repeatability: ±0.3% of F.S. Sensibility to Mounting Position: ±0.1% of F.S. Step Response Time: ~6 sec. typical (SEMI E17-91) Operating Temperature: 5 ~ 40°C, non-condensing Temperature Coefficient: < 0.5% F.S./°C Maximum Inlet Pressure: 1 MPa (10 bar, 150 psi) Minimum Differential Pressure: 50 kPa (70 kPa with H2) Maximum Differential Pressure: 300 kPa (3 bar, 43 psi) Pressure Coefficient: < 0.1% F.S./105 Pa Wetted Materials: 316 L Stainless steel Leak Integrity: < 2.10-8 atm.scc/sec (He) Standard Seals: Viton, Neoprene Fittings: 1/4" VCR, Swagelok Weight: 0.5 Kg Input and Output Specifications: Mass Flow Meter: ±15 VDC, 50 mA Input and Output Signal: From 0 to 5 VDC Electrical Connector: Card edge For Domestic Customers: Packaging, handling, and order processing included in shipping in all domestic shipments as quoted by the shipping calculator. For International Customers there is a $0.00 minimum for packaging, handling, and order processing. International shipping to be determined by destination. Prior to shipment I will need to know the following information (filled out on a form that I will send you) for International Customers or Packages/Freight being Forwarded internationally. International customers may also be subject to a freight forwarder form if applicable.: (1) Are you the end-user of this item? (2) If you are not the ultimate end-user of the item, please state the ultimate end user's name. (3) What is the ultimate country destination? 03/05/12

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